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The General Properties of Si, Ge, SiGe, SiO2 and Si3N4.doc

The General Properties of Si, Ge, SiGe, SiO2 and Si3N4 . June 2002. Virginia Semiconductor. 1501 Powhatan Street, Fredericksburg, VA 22401-4647 USA ...  

Sputter Deposition of Silicon Dioxide - The Department of.doc

Sputter Deposition of SiO2 and Si3N4. ... Note: when sputtering silicon nitride, add Argon and Nitrogen in the proportions shown with throttle valve at 0%, ...  

Getting Better SiO2 and HfO2 Results - Optical Thin Films.doc

SiO2 and HfO2 have been found to be desirable optical coating materials for applications from the ultraviolet (UV) to the near infrared (NIR) ...   Down

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